Semiconductor Storage Systems

In semiconductor fabrication, efficiency and cleanliness are crucial to productivity. Daifuku’s Semiconductor Transport Systems utilize Daifuku’s own HID non-contact voltage induction systems to eliminate particle generation. We offer handling systems for virtually all carriers and sizes.

Daifuku Storage Systems are fast, efficient and reliable. Coupled with a Daifuku Transport System, our storage units will maximize your production capabilities and efficiency. Our Storage systems are available in various sizes and purposes including:

200mm Wafer Storage Systems

• Clean Stocker CLS-40

300mm Wafer Storage Systems

• Clean Stocker CLS-50 and 50II (Horizontally Expandable)
• Clean Mini-Stocker CMS-500 (Interfloor Heights available)
• Zero-Footprint Storage (Sides and bottom of track)

Reticle Stockers